Bakeout

Bakeout refers to the process in which an electron or ion column being under vacuum is exposed to high heat (over 100°C) in its ultra-high vacuum section. An ion getter pump (IGP) is operated during the bakeout in order to absorb the released molecules from the UHV section.

The bakeout allows to achieve an ultra-high vacuum. This process is mainly used for columns whose UHV section has been exposed to the atmosphere or whose ion getter pump is no longer able to generate an appropriate ultra-high vacuum due to long-term use. With FIB-SEM microscopes, both the gun head and the IGP are heated.